سنسور و مبدل سنسور سطح و فلوتر

Product Attributes

Introduction

The SQ4 Series Safety Liquid Leak Sensor is compatible with up to Control Category 4, PLe, and SIL3, and complies with the SEMI S2 standard. It combines two-level detection with safety certification: rapid detection of minor liquid leaks (early-stage leaks) enables personnel to perform preventive or planned maintenance, reducing downtime and damage to work-in-progress; in the event of a major liquid leak (abnormal liquid leak), the target equipment is immediately shut down to ensure safety. In addition, the sensor detects human errors (improper installation) and sensor faults, and can be used standalone without a controller. The system design meets the safety requirements of international standards, with dual CPUs providing advanced safety control.

Features

• Two-level detection: early warning for incipient liquid leaks, emergency stop activation for abnormal liquid leaks
• Capillary action principle enables detection of minute leaks
• Detects human errors (e.g., sensor not installed) and sensor faults
• Knurled sensor head sides for secure grip
• Dual independent CPUs in the controller cross-check operating status; redundant signal processing and output circuits ensure safety

Applications

• Leak detection for semiconductor wafer wet etching process lines